The ThermoFisher Helios 5 Hydra is a state-of-the-art dual-beam microscope that integrates a high-resolution monochromated field emission scanning electron microscope (FE-SEM) with an advanced plasma focused ion beam (PFIB) column. This combination enables fast, precise nanomachining and detailed nanoscale structural analysis. The system offers powerful capabilities for simultaneous chemical characterization through energy dispersive X-ray spectroscopy (EDS) and time-of-flight secondary ion mass spectrometry (TOF-SIMS), as well as crystallographic analysis using electron backscatter diffraction (EBSD). A key feature of the Hydra is its flexibility—it utilizes four different ion species (argon, nitrogen, oxygen, and xenon), allowing users to select the optimal ions for a wide range of materials, including metals, batteries, semiconductors, fiber composites, and biological tissues. The system accommodates various substrate sizes, from large 150 mm wafers to small sample pieces, making it a versatile tool for diverse research applications.
